High resolution heterodyne interferometer without detectable periodic nonlinearity
نویسندگان
چکیده
منابع مشابه
High resolution heterodyne interferometer without detectable periodic nonlinearity.
A high resolution heterodyne laser interferometer without periodic nonlinearity for linear displacement measurements is described. It uses two spatially separated beams with an offset frequency and an interferometer configuration which has no mixed states to prevent polarization mixing. In this research, a simple interferometer configuration for both retroreflector and plane mirror targets whic...
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A high-accuracy (nonlinearity < 2nm) fiber-optic coupled displacement heterodyne measuring Michelson interferometer is developed. The primary limitation of accuracy encountered with this fiber-optic coupled heterodyne interferometer is the optical mixing arising from the imperfection of fiber-optic coupling system. The optical mixing results in the nonlinearity (first order and second order err...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.001159